Stimmen - 3, Durchschnittliche Bewertung: 3.7 ( )

Hersteller: Omega Dateigröße: 728.45 kb Dateiname: M4271.pdf Unterrichtssprache:

TABLE OF CONTENTS A. Introduction.............................................................................................4 1. Unpacking...........................................................................................4 2. Product Overview AndPrinciple Of Operation..........................................4 B. Installation...............................................................................................5 1. General Considerations.........................................................................5 2. Mounting The flow controller ...............................................................7 3. Tubing Connections..............................................................................7 5. Electrical Connections...........................................................................8 a) Overview ....................................................................................8 b) Connecting The 6 Pin Mini Din Connector............................................9 c) Connecting The 6 Pin Mini Din Connector & FMA 3000C Cable ........... 10 d) Connections For The 9 Pin D Sub Connector ...................................... 11 e) Connections For The 15 Pin D Sub Connector..................................... 12 f) Using a 0-5VDC Output / Input Power Adapter Package.......................13 C. Operation ............................................................................................. 14 1. Warm-Up .......................................................................................... 14 2. Verification Of Zero ............................................................................ 14 3. Flow Readings....................................................................................14 4. Changing The Flow Rate Set-Point (Using An External Voltage Source) ....... 15 5. Changing The Flow Rate Set-Point – FMA3400 / 3400ST Only................. 16 6. Power Save Mode...............................................................................16 7. Zero Adjustments................................................................................17 8. Recalibration......................................................................................17 9. Changing The Calibration Gas – FMA3400 / 3400ST Only ..................... 17 D. Maintenance And Product Care................................................................18 1. General............................................................................................. 18 2. Returning Units For Repair Or Recalibration............................................ 18 E. Specifications.........................................................................................19 F. Dimensions............................................................................................ 20 G. Gas K Factors ........................................................................................ 22 H. Trouble Shooting Guide .......................................................................... 23 M-4271/0707, pg. 3 of 26 A. Introduction 1. Unpacking All units are suitably packaged to prevent damage during shipping. If external damage is noted upon receipt of the package, please contact Omega Engineering immediately. Open the package from the top, taking care not to cut too deeply into the package. Remove all the documentation and contents. Take care to remove all the items and check them against the packing slip. The products should also be checked for any concealed shipping damage. If any shortages or damage is noted, please contact Omega Engineering to resolve the problem. Typical Contents ofBox: Control ller, Calibration Certificate & Manual FMA 3200/3200ST shown; FMA 3400/3400ST have an integrateddisplay. Caution: Take care not to drop your controller. Read the installation section of this manual before providing power or tubing connections to the unit. Any damage caused by improper installation or careless handling will not be repaired under warranty (see limited warranty on page 25 for more details). 2. Product Overview and Principle of Operation The FMA 3200/3400 Series Mass Flow Controllers from Omega Engineering are capable of measuring and controlling the flow of virtually any clean, dry gas as low as 0-20 sccm or as high as 0-10 l/min. Repeatable results are achieved using a patented thermal mass flow M-4271/0707, pg. 4 of 26 sensor design. This proven design minimizes zero drift while maintaining fast response and linear outputs with virtually no maintenance. The FMA 3200/3400 Series utilizes thermal flow sensing technology. A portion of the gas flowing through the unit is redirected into a small sensor tube. This tube has two coils on the outside. The first coil introduces a small amount of heat into the gas stream. As the gas passes through the tube heat is transferred from one coil to the other. The flow rate is proportional to the amount of heat transfer. Smart electronics analyze the amount ...

Herunterladen

Geben Sie zwei Ziffern: